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PERFORMANCE
Flow Range: Any range from 0 to 3 sccm to 0 to 30,000 sccm N₂Eq.
Flow Output Signals: 0-5 Vdc, max. load 1 k ohm
Flow Accuracy: ±1.0% full scale including linearity at the calibration conditions. ±1.5% full scale for flow rates greater than 20 slpm
Flow Repeatability: ±0.25% of rate
Flow Temperature Coefficient: 0.1% full scale/°C
Pressure Ranges: Dependent upon remote transducer
Remote Pressure Sensor Input: Suitable for any pressure sensor with a 0-5 V or 0-10 V output signal
Pressure Setpoint Signal: 0-5 Vdc or 0-10 V. 5 Vdc reference output available for setpoint generation. 1 k ohm maximum load
Pressure Ratings: Maximum pressure: 1500 psig
Pressure Equipment Directive (PED) 97/23/EC: Equipment falls under Sound Engineering Practice (SEP)
Pressure Control Range: 100:1 for a remote transducer with a 0-10 V output
Pressure Response Time:
Less than 0.8 seconds typical for a 0-100% command step with less than 2% pressure overshoot
Actual pressure response depends on system design
Temperature Range: 32 to 150°F (0-65°C)
Input/Output Offset: 0.2% full scale
Leak Integrity, Inboard to Outboard:
Elastomer Seal: 1 x 10⁻⁹ atm cc/sec Helium max.
Metal Seal: 1 x 10⁻¹⁰atm scc/sec Helium ma
