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System: DP mode, Barrel type
High Frequency Output: Max. 300W (100W×3 chambers)
Oscillation Frequency: 13.56MHz
Tuning Method: Manual biaxial
Reaction Chamber: Pyrex Glass ø64×160mm×3 chambers
Reaction Gas System: 1 system (oxygen), flow meter
Control System: Auto pressure reduction, auto leak valve
Piping Material: SUS, Teflon, copper and brass
Accessory: Sample dish (large and small)×1 each, Sample shelf×1 pc, Vacuum grease×1 pc, O-ring for reaction chamber×3 pcs
Internal dimensions（φ×D mm）: -
External dimensions（W×D×H mm）: 438×520×556mm
Power Source: AC115V/AC220V Single phase with step-down transformer
Weight: 36kg
