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Measuring range(mm): 400*300*200
Machine size(mm): 1140*900*1700
Weight(kg): 450
Max. load(kg): 25
Accuracy of X-Y axis: 2.5+L/200µm
XYZ resolution: 0.5μm
Repeatability(mm): 0.003
Moving Speed(mm/s): X-Y:300,Z:100
Magnification: optics zoom ratio: 0.7-4.5X; image zoom ratio: 35-230X
Control system: UWC3500 fully closed-loop control
Operated mode: Software+"joystick"
