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1. Dew point detection module
Dew point range: -80℃ ～ +20℃
Measurement accuracy: ±0.5℃
Micro water range: 0.05 ～ 23100 μL/L
Measurement response time（+20℃):
-80℃ →20℃ 5s(63%)，45s(90%)
20℃→-80℃ 10s(63%)，240s(90%)
Resolution
- Dew point: 0.1℃
- Micro water: 0.1ppm（100ppm ～ 1000ppm）
- 0.01ppm (10ppm ～ 100ppm)
Repeatability: ±0.2℃
2. Purity detection module
Measurement range: 0～99.99%
Measurement accuracy: ±0.2%
Repeatability: ±0.1%
Resolution: 0.01%
