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Working principle: Case and purification system to form a closed space, inward injection of inert gas (nitrogen, argon, helium) making cycle, thereby removed the box of the active substance, to achieve the ideal of noble, high purity environment (water 、oxygen ≤lppm).
Technical Parameters:
H2O、 O2: ≤lppm
The leak rate: ≤0.05Vol% h (monthly leakage of oxygen <1L)
Foreline vacuum degree: 0
