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Cleanliness level: Class 100@≥0.5μM (US Federal 209E)
Average wind speed: 0.25～0.45m/s
Noise: ≤62dB（A）
Vibration half peak: ≤5μM（x、y、z direction）
Illuminance: ≥300Lx
Power supply: AC single phase 220V/50Hz
Maximum power: 490W
Weight: 90kg
Work area size: 900×510×600
W1×D1×H1: 930×740×1440
High efficiency filter specification and quantity: 830×560×50
Specification and quantity of fluorescent lamp/ultraviolet lamp: 12W×1, 20W×1
