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APPLICATIONS
+ DI water monitoring
+ Chemical distribution monitoring
+ Chemical quality assurance
+ Immersion lithography
Size range 100 – 500 nm
Size channels 100, 200, 300, 500 nm
Flow rate 20 ml/min
Sample volume 6 ml/min nominal
Maximum concentration
+ 3,000 particles/ml, Monitor mode
+ 9,000 particles/ml, Spectrometer mode
+ 15,000 particles /ml, High-Scatter mode
Sample temperature 50 – 302 °F (10 – 150 °C)
Zero count < 20 counts/l
Maximum pressure 100 psi
Wetted surface materials Sapphire, Teflon®, KEL-F®
Dimensions (d, w, h) 17.5 x 13.75 x 9.1 in (44 x 35 x 23 cm)
Weight 35 lb (16 kg)
Power 100 – 240 VAC 1.25 Amp
Communications Ethernet (PMS protocol) 4-20 mA; RS-232 (for set up only)
Environment Temperature: 50 – 95 °F (10 – 35 °C); Humidity: Non-condensing
