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Application
+ Multi-point cleanroom and process bay monitoring
+ Baseline and qualification of AMC levels in new cleanrooms
+ Analysis and quantification of chemical filter efficiency
+ Characterization of AMC contribution from makeup and recirculation air
Sample point options: 16 or 30 Channels
Analyzer options: NH3, Amines, Acids, Chlorides
Analyzer ranges: 0 - 50 ppbv
Sample tube length (max.): 75 m
Power: 120 VAC or 230 VAC
CDA requirements: 10 LPM, 40 psig input, < -76 °F (< -60 °C) dew point, no particles > 50 μm, hydrocarbon-free
Vacuum: < 33 kPa (absolute)
Weight: Depends on analyzer configuration
Dimensions (H x W x L): 46 x 23 x 30 in (117 x 58 x 76 cm)
Communication: Ethernet (OPC)
