Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Enclosure Dimensions
W x D x H – Footprint: 680W x 1127D x 1890H (26.77W x 62.3D x 74.4H in.)
Net Weight: 485 kg (1069 lbs.)
Equipment Clearance: Right, Left – 153 mm (6 in.), Front – 680 mm (27 in.), Back – 483 mm (19 in.) min.
Maximum Volume: 127 liters (7774 in³)
Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power
Number of Electrode Positions: 14
Electrode Pitch:
25.4 mm (1 in.) for 600 W
50.8 mm (2 in.) for 1000 W
Electrodes
Powered Working Area 349W x 425D mm (13.74W x 16.73D in.)
Ground/Perforated Working Area 384W x 425D mm (15.12W x 16.73D in.)
Floating Working Area 349W x 425D mm (13.74W x 16.73D in.)
RF
Power Standard Wattage: 600 W
Frequency: 13.56 MHz
Gas Control
Available Flow Volumes: 100, 250, 500, or 1000 sccm
Maximum Number of MFCs: 3
Control System and Interface
Software Control: EPC control with touchscreen interface
Remote Interface: PlasmaLINK, ProcessLINK, SECS/GEM
Vacuum Pump Standard Wet Pump: 53 cfm with Oxygen Oil Mist Eliminator
Optional Purged Dry Pump: 63 cfm
N2 Purged Pump Flow: 14 slm
