MKS O3CS Compact Ozone System (0.5-20 slm)

Ozone Output: 25-225 g/hr (configuration dependent) at 25 psi ozone delivery pressure and 17°C cooling water

Ozone Concentration: Up to 20 wt% (300 g/m3) (configuration dependent)

Flow Rate: 0.5-20 slm (configuration dependent)

Operating Temperature: 20-40°C (68-104°F)

Nominal Cell Pressure (Delivery): 0.7-3.1 bargauge (10-45 psig)

Control Interface: Remote operation, Discrete analog I/O 25 pin D-sub, DeviceNet®, Ethernet Modbus TCP

Voltage Requirements: 208 VAC

Current Requirements: Nominal current 2-10A max (configuration dependent)

Frequency: 50/60 Hz

Phase: 3 phase and GND (no neutral)

Dimensions: 482 x 429 x 267 mm (19 x 16.89 x 10.5 in)

Weight: 40 kg (88 lb) (approximate - configuration dependent)

Compliance: SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1

Literature

Drawing