MKS GM51A Metal Sealed, Digital Mass Flow Controller (5sccm-50slm; 1.25in. Wide)

Control Range: 2-100% of Full Scale

Full Scale Flow Range: 5 - 50000 sccm (N2 equivalent)

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Typical Accuracy: ±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale

Repeatability: ± 0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading/°C

Inlet Pressure Coefficient: <0.02% of Reading/psi

Typical Settling Time: <750 msec, typical above 5% Full Scale

Warm-up Time: 30 minutes

Operating Temperature: 10°C to 50°C

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Storage Temperature: -20° to 80°C

Wetted Materials: 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45

Weight: 3 lbs (1.4 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing