MKS 910 Absolute Piezo Vacuum Pressure Transducer (NW16 ISO-KF; RS232/analog)

Absolute Measurement Range: 1.0 x 10-5 to 1500 Torr

Digital Communication: RS232

Type: Vacuum Transducer

Sensor: MicroPirani (MEMS Thermal Conductivity), Piezo absolute (MEMS diaphragm)

Display: No

Seal Material: Viton

Electrical Connector: 15-pin, High Density, D-sub male

Interface: RS232/analog

Relays: 3

Fitting Type: NW16 ISO-KF

Installation Orientation: Any

Set Point Range: 5.0 x 10-4 - 1500 Torr, Absolute

Calibration Gas: Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon, Gas independent above 11 Torr

Operating Temperature: 0 - 40°C (32 - 104°F)

Maximum Bakeout Temperature: 85°C (185°F)

Analog Output: 1-9.2 VDC, (1 VDC per Decade)

Analog Output Resolution: 16 bit

Relay Contact Rating: 1 Amp @ 30 VAC/DC, resistive

Relay Response: 100 msec maximum

Power Requirements: 9 - 30 VDC, <1.2 Watts maximum

Accuracy: 5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 11 Torr ±5% of Reading, 11 - 1000 Torr ±0.75% of Reading

Repeatability: 5 x 10-4 to 10-3 Torr ±8% of Reading, 10-3 Torr to 11 Torr ±2% of Reading, 11 - 1000 Torr ±0.2% of Reading

Overpressure Limit: 2250 Torr (absolute)

Exposed Materials: Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton

Electronic Casing and Flange: 304 stainless steel

Compliance: CE

Digital Baud Rates: 4800 - 230400 Baud

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