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Absolute Measurement Range: 1.0 x 10-5 to 1500 Torr
Digital Communication: RS232
Type: Vacuum Transducer
Sensor: MicroPirani (MEMS Thermal Conductivity), Piezo absolute (MEMS diaphragm)
Display: No
Seal Material: Viton
Electrical Connector: 15-pin, High Density, D-sub male
Interface: RS232/analog
Relays: 3
Fitting Type: NW16 ISO-KF
Installation Orientation: Any
Set Point Range: 5.0 x 10-4 - 1500 Torr, Absolute
Calibration Gas: Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon, Gas independent above 11 Torr
Operating Temperature: 0 - 40°C (32 - 104°F)
Maximum Bakeout Temperature: 85°C (185°F)
Analog Output: 1-9.2 VDC, (1 VDC per Decade)
Analog Output Resolution: 16 bit
Relay Contact Rating: 1 Amp @ 30 VAC/DC, resistive
Relay Response: 100 msec maximum
Power Requirements: 9 - 30 VDC, <1.2 Watts maximum
Accuracy: 5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 11 Torr ±5% of Reading, 11 - 1000 Torr ±0.75% of Reading
Repeatability: 5 x 10-4 to 10-3 Torr ±8% of Reading, 10-3 Torr to 11 Torr ±2% of Reading, 11 - 1000 Torr ±0.2% of Reading
Overpressure Limit: 2250 Torr (absolute)
Exposed Materials: Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton
Electronic Casing and Flange: 304 stainless steel
Compliance: CE
Digital Baud Rates: 4800 - 230400 Baud
