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Absolute Measurement Range: 1.0 x 10-9 to 760 Torr
Digital Communication: EtherCAT
Type: Vacuum Gauge Module
Display: No
Relays: 2
Fitting Type: 2.75 in. CF
Operating Temperature: 10 - 40°C (50 - 104°F)
Maximum Bakeout Temperature: 105°C (221°F) maximum, with electronics removed
Storage Temperature: -40 to +70°C (-40 to +158°F)
Analog Output: Logarithmic, 0.5 to 7.0 VDC, 0.5 V/decade
Internal Volume: 10.8 cm3 (0.65 in3)
Exposed Materials: 304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
Electronic Casing and Flange: Aluminum Extrusion with Powder-coat
Compliance: CE
Filament: Yttria-coated Iridium
Response Time: <25 mseconds
Connectors: 15-pin subminiature-D male, two RJ45
Units: Torr
X-ray Limit: <3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
