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Control Range: 2% to 100% of Full Scale
Full Scale Flow Range: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type: Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok®
Analog I/O Connector: 9-pin or 15-pin Type "D"
Seal Material: Buna-N, Neoprene®, Kalrez®
Maximum Inlet Pressure: 150 psig
Normal Operating Pressure Differential: 10 to 40 psid (10 to 5000 sccm)
15 to 40 psid (10000 to 30000 sccm)
(with atmospheric pressure at the MFC outlet)
Typical Accuracy: ±1.0% of Full Scale
Repeatability: ±0.2% of Full Scale
Resolution: 0.1% of Full Scale
Zero Temperature Coefficient: <0.05% of Full Scale/°C
Span Temperature Coefficient: <0.08% of Reading./°C
Pressure Coefficient: <0.02% of Reading/psi
Warm-up Time: 2 minutes
Typical Settling Time: <2 sec
Operating Temperature: 0° to 50°C
Power Requirements: ±15 VDC (200 mA start-up, 100 mA steady-state)
Compliance: CE
For specific range please check the attachment below!
