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Measuring range [mm]:
+ Vision: 12x8x8" (300×200×200)
+ Common to vision touch probe: 9x8x8" (234×200×200)
Observation unit: Programmable power turret 1X-2X-6X
Tracking Auto Focus device: Yes
Illumination unit:
+ Contour illumination: White LED
+ Surface illumination: White LED
+ PRL : White LED
Resolution of scale [µm]: 0.1
Vision measuring accuracy [µm]:
+ EUX/EUY, MPE: (1.5 + 3L/1000)
+ EUXY, MPE: (2.0 + 4L/1000)
+ EUZ, MPE: (1.5 + 4L/1000)
TP measuring accuracy [µm]: EX, MPE/EY, MPE/EZ, MPE: (1.8 + 3L/1000)
LAF Repeatability [µm]: σ≤0.8
Temperature compensation function: Manual
