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Range X-Axis: 0-40in 0-1000mm
Range Y-Axis: 0-40in 0-1000mm
Range Z-Axis: 0-6in 0-150mm
Resolution: 0.1µm
High-sensitivity CCD camera: BW
Accuracy (20°C 1.0°C): E1xy-(1.5+3L/1000)µm
E1z-(3.0+4L1000)µm
E2xy-(2.5+4L/1000)µm
Max.Drive Speed: X/Y: 400/150mm/s
Illumination: Surface-LED,white; Contour-LED,White; PRL-LED,white (4 divisions)
Magnification change system: Programmable power (1x ,2x ,6x) turret
Stage glass size: 46.7x46.7in 1186x1186mm
Dimension: 75.3x82x63in 1912x2086x1603mm
Mass: 6490lbs 2950kg
