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Range X-axis: 0-15.75in 0-400mm
Range Y-axis: 0-15.75in 0-400mm
Range Z-axis: 0-9.84in 0-250mm
Resolution: 0.02µm
Resolution Z scale using Tracking Autofocus (TAF): 0.3µm
Camera: High-sensitivity CCD camera B&W
Accuracy: E1xy-(1.5+3L/1000)µm
E1z-(1.5+4L/1000)µm
E2xy-(2+4L/1000) µm
Drive Speed: 200mm/s
Illumination: Surface-White LED
Contour- White LED
Programmable Ring Light- White LED
Maganification change system: Programmable power turret (1x2x6x)
Stage glass size: 19.4x21.7in 493x551mm
Max. workpiece height: 9.8in 250mm
Max.workpiece load: 66lbs 30kg
Dimension(including machine stand): 40.4x55.3x70in 1027x1407x1778mm
Mass(including machine): 1276lbs 579kg
Optional accessories
Laser Auto Focus
Rotary Index
