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Resolution: 0.1 µm
Factory option: Tracking Auto Focus (TAF)
High-sensitivity CCD camera: B&W CCD camera
Contour illumination: White LED
Coaxial illumination: White LED
4-quadrant PRL (1) illumination: White LED
Range (X, Y, Z-axis) with Vision Head: 1000x1000x150 mm
Magnification change system: Programmable Power Turret (PPT) 1X ; 2X ; 6X
Max. drive speed X, Y-axis: 400 mm/s
Accuracy E1: (1.5+0.3L/100) μm
Stage glass size: 1186x1186mm
