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Measuring range (X×Y×Z):
+ Vision measuring area: 300×200×190 mm
+ WLI measuring area*1: 215×200×190 mm
WLI optical head unit:
+ View field (H×V): 5X lens: approx. 0.64×0.48 mm /10X lens: approx. 0.32×0.24 mm / 25X lens: approx. 0.13×0.10 mm / 50X lens: approx. 0.064×0.048 mm
+ Z repeatability: 2σ≤ 0.08 µm
Vision optical head unit
+ Observation unit: Programmable power turret 1X-2X-6X
+ Imaging device: B&W CCD (1/2 in)
+ Vision measuring accuracy*2: E1X, E1Y: (0.8 + 2L/1000) µm; E1Z: (1.5 + 2L/1000) µm; E2XY: (1.4 + 3L/1000) µm
