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X-Axis: 0-118.31in 0-3005mm
Y-Axis: 0-197.05in 0-5005mm
Z-Axis: 0-59.25in 0-1505mm
Resolution: .000004in 0.0001mm
Accuracy: E-(5.5+5L/1000)µm, R-5µm
Mass (main unit): 35273lbs 16000kg
Length standard: High accuracy linear encoder
Guide system: Air bearing
Max. drive speed: 430mm/sec
Max. acceleration: 0.17G
Air pressure: 0.4MPa
Air consumption: 120L/min
