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Drive method: X axis/Y axis/Z axis : Manual
Optical Magnification: Zoom: 0.75X-5.25X (in 8steps)
Measuring range (X×Y×Z): 16"× 8"× 6" (400×200×150mm)
Resolution/Length standard: 0.1μm/Linear encoder
Image detecting unit: 1/2" Color CMOS camera
Indication accuracy
X, Y (2.5+20L/1000)µm
Z (5.0+40L/1000)µm
Operating temperature range: 20±1°C
Stage glass size: 17"× 9" (440×240mm)
Maximum stage loading: 33 lbs (15kg)
Illumination:
Stage light: 12V/50W Halogen
Co-axial light: 12V50W Halogen
Ring fiber light: 12V/100W Halogen
Main Unit:
Dimensions (W×D×H)mm: 30"× 37"× 33" (757×930×837mm)
Mass: 321 lbs (146kg)
Power Unit:
Dimensions (W×D×H)mm:12"× 13"× 4" (310×330×102.5mm)
Mass: 11 lbs (5kg)
Power consumption: 160W at max
Accessory option:
• Rotary table: Rotary table with fine-feed knob (B) (176-306)
• Swivel center support (172-197)
• Holder with clamp (176-107)
• V-block with clamp (172-378)
