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Measuring range:
X-axis 1200mm
Y-axis 1200mm
Z-axis 1000mm
Resolution: 0.0001 mm (0.1 μm)
Guide method: Air bearings on each axis
Drive speed
- CNC MODE: Drive speed 8 - 400mm/s; max. speed: 693 mm/s
- J/S MODE: 0 - 80mm/s (J/S Mode: High Speed); 0 - 3mm/s (J/S Mode: Low Speed); 0.05 mm/s (J/S Mode: Fine Speed)
Max. measuring speed: 5 mm/s
Max. drive acceleration: Each axis: 1,000 mm/s², max. combined acceleration: 1,732 mm/s²
Workpiece
- Maximum height: 1200mm
- Maximum mass: 2000 kg
Mass (including the control device and installation platform): 4050 kg
Air supply
- Pressure: 0.4 MPa
- Consumption: 100 L/min under normal conditions (air source: 150 L/min)
