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Resolution: max. 6 nm (with 210 mm probe arm)
Start of traversing length (in X):0.1 mm
Probe arm length: 210 mm; 350 mm; 490 mm
End of traversing length (in X):280 mm
600 mm Z-Achse
Without angular adjustment of the X-axis
Positioning speed: 0.02 – 200 mm/s (in X)
Guide deviation: 0.350 µm/60 mm,0.400 µm/140 mm,0,75µm/280 mm
Measuring speed: 0.02 – 10 mm/s
Measuring range:70 mm (in Z with 350 mm probe arm)max. 100 mm (with 490 mm probe arm)
Measuring force:4 mN to 30 mN, in Z+ and Z-, adjustable via software
Optional:
Manual control panel with joystick and display
Motor-driven TY axis
Parallel vice
Prism block
Equipment table
Vibration damping system
General software options:
Option - ContourPlus
Option - MeasurementPlus
Option - Roughness in Contour view
Option - EasyRoughness
Option - QS-STAT / QS-STAT Plus
Option - Profile processing
Option - Topography
