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Measuring principle: Stylus method
Probe: BFW skidless system
Measuring range: ±250 µm (up to ±750 µm with 3x probe arm length)
Profile resolution:
±250 µm: 8 nm
±25 µm: 0.8 nm
Filter according to ISO/JIS: Gaussian filter as per ISO 11562, Filter as per ISO 13565
Number n of sampling length according to ISO/JIS: 1– 5
Contacting speeds: 0.2 mm/s; 1.0 mm/s
Stylus: 2 µm
Measuring force: 0.75 mN
Weight measuring instrument: 1.0 kg
Accessories
Measuring stand
ST-D, ST-F and ST-G
Holder on measuring stand
Other accessories
CT 120 XY table, parallel vise, V-block
Assorted probe arms for the BFW probe system
Included:
MarSurf M 400 evaluation instrument
MarSurf SD 26 drive unit including BFW 250 probe system
Standard probe arm (6852403)
1 roll of thermal paper
Wide-range power supply unit with 3 adapters
2 USB cables (for connecting to the PC and the M 400)
Operating instructions
Case