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Work table
X/Y axis travel: 600*600 mm
Z axis travel: Effective space is 245mm,focusing stroke is 200mm,work distance is 95mm
Mental table size: 1000*1000mm
Glass table size: 650*650 mm
Drive type X/Y/Z axis precision linear guide, X/Y axis precision optical axis drive, Z Axis grinding ball screw drive.
Measure drive system
Optical scale resolution: X/Y/Z axis 0.0005mm(0.5μm)
Measure accuracy: ≤3μm+L/200 reapeatability accuracy: ≤3μm+L/200
Z axis high performance servo motor,double closed loop control system.
Image System
Camera: Japanese SONY CCD video magnification 30-230X
Len: high definition zoom lens/Continuous magnification 0.7-4.5X
Can match: 0.5X objective lens, total magnification:15-115X
Can match: 2X objective lens, total magnification:60-460X
Light system: Surface light and projection light,cold light,long life,brightness adjustable.
Machine external dimension: 1800*1300*1750
Weight: 2000 kg
