KOFLOC 3660-1/4SWL-N2-10SCCM-20°C Standard Mass Flow Controller (10SCCM, N2)

Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.

Accuracy：±1～1.5%F.S.

Fitting: 1/4 SWL type

Fluid: N2

Full-scale flow rate: 10SCCM

Calibration temperature: 20°C

Settling Time: Within 98%F.S., 2 seconds 

Accuracy Within: ±1.0%F.S.(25℃) 

Repeatability Within: ±0.5%F.S. 

Control Range: 2 – 100%

Differential Pressure:

 50kPa – 300kPa(F.S. 10SCCM - 5SLM)

100kPa – 300kPa(F.S. 10SLM - 20SLM)

Pressure Resistance: 980kPa

Leak Integrity 1 x 10^-8 Pam3/s He

Ambient Temperature Within: 5 – 45℃ (Accuracy warranty:15 –35℃)

Storing Temperature: 60℃(Max.)

Command Input: 0.01- 5VDC(Valve is fully closed at setting input of F.S.2% or less).

Output Signal: 0 – 5V DC

Power Supply Sensitivity: +15V DC 100mA ; -15VD 200mA

Valve Type: Normally-closed type (Solenoid)

Configuration material: SUS316,SUS316L, VITON,TEFLON

Manual