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Measuring sensor : Point sensor
Measuring range (Dimension from … to …): Variable between 70 … 110 mm and 360 … 400 mm
Repeat accuracy : 0.3 µm
Measuring range (Dimension / Diameter): 40 mm
(Difference between largest and smallest dimension of the measured object)
Measuring height range (with one component rotation): 0.001 mm
Throughput related to object height 15 mm : 18 s
Throughput related to object height 60 mm : 63 s
Max. Measuring object height : 500 mm
Throughput for single target cross-section : 4.5 s
Linearity - Dimension : ±0.25-1.5µm
