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Working Stage:
X,Y,Z-axis Travel(mm): 200 X 100X200
Metal Stage Size (mm): 404x228
Glass Stage Size (mm): 260x 160
Load-bearing weight (kg): 35
Accuracy:
X, Y-axis (µm): (3+L/200)µm, Repeatability 2µm
Z-axis: (4+l/200)µm
Grating Ruler: High-precision grating ruler, resolution 0.5µm
CCD: Japan Sentech Color 625 colorful CCD Camera
Optical System: Automatic Zoom Lens ,Object View: 7-1.lmm, zoom ratio 12X, Video Total Magnification: 30X-230X
Illumination System: Continuous adjustable LED ring surface &contours&coaxial light, according to program-controlled to adjust the intensity&rate of light
Software system: QuickMeasuring, Automatic video measurement software
Working Environment: 20C+3C, Temperature 45%-75%, isolated from the external vibration source
Power Supply: 220V+10%,180V-260V(AC),50HZ
Optional Accessories: Can match with Objective/Laser/Probe/cupboard/version/ Brand CCD...
Dimensions(mm): 600x550x920
Net Weight(KG): 102
