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X axis measuring range: 140mm
X axis resolution: 0.2µm
X axis traverse speed: 0.05~15mm/s
Z axis measuring range: 50mm
Z axis resolution: 0.05μm
Z axis traverse speed: 0.2~15mm/s
Straightness: 0.5µm/100mm
Linear accuracy: ±(0.8+|0.15Η|)µm, H is measuring height in mm
Angular measuring accuracy: ±1'
Arc measuring accuracy: ±(1.5+R/12)µm, R is 2~10mm standard ball
Measuring unit: μm/μin
Measuring speed: 0.05~1mm/s
Traceable angle: 72° (upward), 88° (downward)
Travel of Z axis: 430mm
Power supply: 220±5%V, 50Hz
Dimension (L×W×H): 1400×850×1780mm
Weight: 350kg
ROUGHNESS MEASUREMENT SPECIFICATION
Roughness parameters: Ra, Rp, Rv, Rz, Rz(JIS), R3z, Rz(DIN), Rzj, Rmax, Rc, Rt, Rq, Rsk, Rku, Rsm, Rs, PAq, Rk, Rpk, Rvk, Mr1, Mr2, Rmr
Waviness parameters: Wa, Wt, Wp, Wv, Wz, Wq, Wsm, Wsk, Wku, Wmr
Original profile parameters: Pa, Pt, Pp, Pv, Pz, Pq, Psm, Psk, Pku, Pmr
Measuring range: +420µm
Resolution: 0.001μm
Linear accuracy: ≤±(5nm+2.8%)
Probe radius/angle: 5μm/90°
Cut off: 0.025/0.08/0.25/0.8/2.5/8mm
Number of cut-offs: 2~7
Measuring unit: μm
Measuring speed: 0.05~0.25mm/s
