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Measuring range (X×Y×Z): 200×100×200mm
Stage size: 404×228mm
Glass stage size: 260×160mm
Resolution of X/Y/Z axis: 1μm
Accuracy of X/Y axis: ≤(3+L/200)µm (L is the measuring length in mm)
Repeatability of X/Y axis: 2μm
Objective: 0.7X~4.5X (zoom)
View field (diagonal length): 1.0~6.6mm
Working distance: 92mm
Magnification: 37.2X~236.0X (on 21.5" monitor)
Camera: 1/2" color CCD, 1.3M pixel
Illumination: surface and contour with adjustable LED
Max. height of workpiece: 200mm
Max. weight of workpiece: 20kg
Operation system: Windows 10/11
Power supply: 220V, 50Hz
Dimension (L×W×H): 556×540×860mm
Weight: 180kg