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Measuring range (X×Y×Z): 400 × 300 × 300 mm
Stage size: 765 × 565 mm
Glass stage size: 430 × 330 mm
Resolution of X/Y/Z axis: 0.1 μm
Accuracy of X/Y axis: ≤(1.4 + L/200) μm (L is the measuring length in mm)
Repeatability: 1.4 μm
Objective: 0.6X ~ 8.0X (zoom)
Working distance: 65 mm
View field (diagonal length): 0.94 ~ 12.3 mm
Magnification: 25X ~ 338X (on 22" monitor)
Camera: 1/1.7" color CCD, 2.3M pixel
Max. height of workpiece: 280 mm
Illumination (surface): coaxial light, six-ring eight-zone adjustable ring light
Illumination (contour): adjustable LED light
Operation system: Windows 10/11
Max. weight of workpiece: 25 kg
Drive method: automatic
Environmental requirement: temperature 20°C ± 2°C; relative humidity 30% ~ 80%; vibration < 0.002g, < 15 Hz
Power supply: 200 ~ 240 V, 50/60 Hz, 700 W
Dimension (L × W × H): 800 × 1240 × 1966 mm
Weight: 440 kg