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Accuracy: ±1-3% or ±20μm (±1-3% or ±1.0mil)
Range: 0-5mm / 0-200mils
Resolution: 1μm: 0-1mm (0.1mil: 0-50mils); 10μm: 1-5mm (1.0mil: 50-200mils)
Scan Probe
Minimum Headroom: 90mm (3.54")
Minimum Sample Diameter: 15mm (0.59")
Minimum Convex Surface Diameter: Flat Surface
Minimum Concave Surface Radius: Flat Surface
