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Series Inlet Fitting: 1/4” Tube Compression
Performance
Full Scale Ranges (H2O): 3000sccm
Turndown Ratio: 20:1
Step Response Time: ≤ 2 seconds (±2% of setpoint)
Accuracy: ±1.0% of setpoint (> 10% full scale); ±0.2% of full scale (5-10% full scale setpoint)
Linearity: ±0.5% of full scale
Repeatability: ±0.2% of full scale
Temperature Coefficient: 0.05% F.S. per °C (zero and span)
Valve Shutdown: <0.5% F.S. (water vapor)
Electrical
Communication: Analog or EtherCAT
Connections: 15-pin D-Sub and dual RJ-45
Input Signals:
Flow setpoint (0 to 5 Vdc)
Start up/drain
Output Signals:
Flow output (0 to 5 Vdc)
Ready to use
Power:
DC: ±15 Vdc ±5% @ 1.2 amp
AC: 208 - 230 Vac, 50/60 Hz, 290 watts nominal
Diagnostic Port: Micro USB
For more details, see datasheet.
