Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Digital Communications I/O: EtherCAT
Mechanical Connection: 1/2” VCR
Valve Type: Normally closed (Size 3, Pressure diff. >30 psig (2 bar))
Analog Communications I/O: None
Revision Level: RevB
Performance:
Full Scale Flow Range (N2, Eq. 0ºC Ref): 100 - 1100 slpm/ 1100-2500slpm
Flow Accuracy—17025 Certified Devices: ±0.6% of S.P. (20 - 100% F.S.), ±0.12% F.S. (<20% F.S.)/ ±0.6% F.S
Flow Accuracy: ±0.9% of S.P. (20 - 100% F.S.), ±0.18% of F.S. (<20% F.S.)/ ±1.0% F.S
Control Range N2, eq.: 100:1 for F.S. from 1 - 50 slpm (50:1 for all other F.S. flows)
Repeatability & Reproducibility: 0.20% S.P
Linearity: Included in accuracy
Response Time (Settling Time within ±2% F.S. for 0 - 100% command step): <3 second
Zero Stability: <+0.2% F.S. per year
Temperature Coefficient Zero: <0.05% of F.S. per °C Span: <0.1% of S.P. per °C
Pressure Coefficient: ±0.03% per psi (0 - 200 psi N2)
Attitude Sensitivity: <0.2% F.S. maximum deviation from specified accuracy after re-zeroing
Ratings:
Operating Temperature Range: (-14) - 65°C (7 - 149°F)
Minimum Pressure Differential (Controllers): 7.5 psi / 0.52 bar at 500 lpm
Maximum Pressure Differential (Controllers): 290 psi / 20.0 bar
Leak Integrity (External) 1x10^-9 atm. cc/sec He
Valve Shut Down (Leak-by)7 <1% of F.S. standard; improved shutoff available with Biotech package
For more details, see datasheet.
