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Flow Accuracy: Standard Flow Accuracy or [(zero stability/flow rate) x 100]% of rate, whichever is greater
Standard Flow Accuracy: Liquid: 0.2%; Gas: 0.5% of rate
Zero Stability Stainless Steel Sensor (kg/hr): 0.00013/0.0010/0.0040
Repeatability & Reproducibility: +0.05% or +[0.5 x (zero stability/flowrate) x 100]% of rate whichever is greater
Response Time (Settling Time): 2% F.S. of final value,(per SEMI Guideline E17-91): <2 seconds
Temperature Coefficient Zero: 0.05% F.S./°C; Span: 0.035% F.S./°C
Control Range / Turndown: 100:1 or down to minimum flow
Ratings
Operating Temperature Range: 0 to 60ºC
Temperature Accuracy (Device): ±0.5ºC
Differential Pressure Range:
Liquid: 10 to 200 psi (0.69 to 13.8 bar)
Gas: 10 to 150 psi (0.69 to 10.3 bar)
Maximum Operating Pressure:
Standard: 500 psi (34.5 bar)
Optional: 1500 psi (103 bar)
Density Range: 0 to 2.0 g/cc
Density Accuracy: ±0.005 g/cc
Leak Integrity (External):
Elastomer: Outboard 1 x 10-9 atm. cc/sec., helium (max)
Metal Seal: 1 x 10-10 atm. cc/sec., helium (max)
For more details, see datasheet.
