Brooks Instrument PC115XU Metal Sealed Pressure Controllers (3–5.000 sccm N₂Eq, ±1% of reading)

Performance

Pressure Control Mode: Upstream

Full Scale Range: 3-5000 sccm N₂Eq.

Pressure Reading

Accuracy: ±1% of reading

Zero Temperature Coefficient: ±0.02% of F.S./ºC

Span Temperature Coefficient: ±0.04% of reading/ºC

Pressure Control

Measurement Range: 2-100% F.S.

Accuracy: <10% F.S. ±0.2% F.S., 10-100% F.S. ±1% F.S.

Response Time: <1 sec typ. (excluding system time constant)

Ratings

Operating Temperature Range: 10 to 50ºC

Transducer Pressure Range: 1000 Torr

Transducer Over Pressure Limit: 2000 Torr

Differential Pressure: 150 Torr min

Leak Integrity (external): 1 x 10⁻¹⁰ atm. cc/sec He

Electrical

Electical Connection:

RS485/Analog via 9-Pin "D" connector,

DeviceNet™ via 5-pin "M12" connector

Digital Communications:

RS485 (model specific),

DeviceNet (model specific)

Diagnostic/Service Port: RS485 via 2.5 mm jack

Power Supply/Consumption:

DeviceNet: 545mA max. @ +11-25 Vdc, 250 mA max. @ 24 Vdc

RS485/Analog: 6 Watts max @ ±15 Vdc.(±10%) or +24 Vdc (±10%)

Datasheet

User Manual