Brooks Instrument GP200 Metal Sealed Pressure-based Mass Flow Controllers (3 sccm ~ 50.000 sccm)

Performance

Full Scale Flow Range: 3 sccm to 50,000 sccm F.S. N2 Equivalent

Process Gas Flow Accuracy:

Zero Leak Valve: <±1% S.P. (5 – 100% F.S.); <±0.05% F.S. (0.5 - 5% F.S.)

Metal Seal Valve: <±1% S.P. (5-100% F.S.); <±0.05% F.S. (2-5% F.S.)

Control Range: 0.5 - 100% F.S; 2 - 100% F.S.

Repeatability & Reproducibility:

5-100% = ±0.15% of S.P.; 0.5-5% = ±0.015% of F.S

5-100% = ±0.15% of S.P.; 2-5% = ±0.015% of F.S

Transient Response & Flow Settling Time: 280 ±20 ms Matched Transient Response, for any ascending or descending non-zero setpoint

(Fast Response Option available via Customer Special Request.)

Valve Leak-by: Zero Leak Valve: <0.005% of F.S. of the bin (Bins 42-46); <0.02% of F.S. of the bin (Bins 40-41) (@ 45 psia to VAC

Metal Seal Valve: <0.15% of F.S. of the bin; (@ 45 psia to VAC)

Supply Pressure Insensitivity/Cross-Talk: <±1% S.P. up to 40 psi/sec inlet pressure spike

Steady State Back Pressure Insensitivity: Insensitive to steady state back pressure

Dynamic Back Pressure Insensitivity: Maintains accuracy during disturbance from vacuum to 1200 Torr over a period of 1 sec

Zero Stability: <±0.15% F.S. per year

Temperature Coefficient:

Zero: 0.005% F.S. per °C

 Span: 0.05% S.P. per °C

Number of Standard Configurations: Nine (9) standard bin ranges

Dynamic Gas and Range Programmability: Device may be configured via single tool command in less than 1 second or via BEST software with independent USB diagnostic port

Attitude Insensitivity: Insensitive to device orientation after re-zeroing

Ratings:

Operating Temperature Range: 10 – 60°C

Operating Inlet Pressure:

<15 psia for Low Pressure (LP) bins, configurable based on application

15 to 30 psia

 25 to 40 psia

 35 to 50 psia

 45 to 60 psia

Operating Outlet Pressure:

Vacuum to Atmosphere

Up to 1200 Torr for some applications

Differential Pressure Range:

Min: 7 psid typical 

Max: up to 50 psid

External Leak Integrity:  1 x 10^-10 atm cc/sec He

Proof Pressure:

100 psia, CT Bin Devices (70 psia for Helium and Helium mixtures on CT Bin Devic)

45 psia, LP Bin Devices

Design Pressure: 150 psia

Burst Pressure: 1000 psia

For more details, see datasheet.

 Datasheet

User Manual