Brooks Instrument GF080 Gas Mass Flow Controllers & Meters (RS485, 1/4” VCR, 4 - 20 mA)

Fitting: 1/4” VCR

Communications / Connector : RS485 (L-Protocol)/Analog (Input 4 - 20 mA; Output 4 - 20 mA); 15-Pin Male D

(Celerity®/Legacy Protocol)

Performance: 

Full Scale Flow Range (N2Eq.): 3 sccm to 55 slm

Flow Accuracy: ±1% S.P. 35 - 100%, ±0.35% F.S. 2 - 35%

Repeatability & Reproducibility: <±0.2% S.P.

Linearity: ±0.5% F.S. (included in accuracy)

Response Time (Settling Time): Normally Closed Valve <1 sec. (within 2% for steps 0 - 10 through 0 - 100%)

Control Range: 2 - 100%

Number of Bins: 11 bins

Valve Shut Down: <1% of F.S.

Zero Stability: <±0.5% F.S. per year

Pressure Coefficient: 0.03% per psi (0 - 50 psi N2)

Attitude Sensitivity: <0.25% span change @ 90°C after rezeroing (N2 @ 50 psi)

Auto shut-off: The Auto Shut-off feature closes the GF80 valve when the set point drops below 1.5% of full scale

Available Gases: MultiFlo™ Capable

Ratings

Operating Temperature Range: 5 - 50°C (41 - 122 °F)

Maximum Operating Pressure1 150 psig (10 bar)

Differential Pressure Range:

3 - 860 sccm = 7 - 45 psid,

861 - 7200 sccm = 15 - 45 psid,

 7201 - 50000 sccm = 25 - 45 psid

Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure

Leak Integrity (external): 1x10^-10 atm. cc/sec He

For more details, see datasheet.

Datasheet

User Manual