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Meter Series Fitting: 6 mm tube compression
Communications/Connector： EtherCAT™ / (Output 0-5 V); 2xRJ45 signal 2-Pin power
Performance:
Full-Scale Flow Range (N2Eq.): 3 sccm to 50 slm
Flow Accuracy: ±1% S.P. 35-100%, ±0.35% F.S. 2-35%
Repeatibility & Reproducibility: <±0.2% S.P.
Linearity: ±0.5% F.S. (included in accuracy)
Response Time (Settling Time):
Normally Closed Valve <1 sec (within 2% for steps 0-10 through 0-100%)
Normally Open Valve <3 sec (within 2% for steps 0-10 through 0-100%)
Control Range: 2 - 100%
MultiFlo™: Standard
Number of Bins: 10 bins
Valve Shut Down: <1% of F.S.
Zero Stability: <+0.5% F.S. per year
Pressure Coefficient: 0.03% per psi (0-50psi N2)
Attitude Sensitivity: <0.25% span change @ 90° after rezeroing (N2@ 50 psi)
Auto Shut-off: The Auto Shut-off feature closes the GF0xx valve when the set point drops below 1.5% of full scale
Ratings
Operating Temperature Range: 5-50°C (41-122°F)
Maximum Operating Pressure: 150 psig (10 bar)
Design Proof Pressure: 4000 psig (275 bar)
Differential Pressure Range:
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-50000 sccm = 25-45 psid
Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure
Leak Integrity (External): 1x10^-9 atm. cc/sec He
For more details, see datasheet.
