Brooks Instrument CMX-3-M11-4-0 Capacitance Manometers (160°C, 100 mTorr, 15-Pin D Sub, 0.5" OD Tube Stub)

Sensor Temperature: 160°C 

Full scale range: 100 mTorr

Fitting:0.5" OD Tube Stub (No Fitting)

Ambient Operating Temperature:  15°C to 35°C

Accuracy: ±0.25% of Reading

Response Time: Pressure: 40mSec

Zero Temperature Coefficient:0.002% Full Scale/°C

Span Temperature Coefficient: 0.02% Reading/°C

Analog Communication:0 - 10 Vdc, RS485

Digital Communication:RS485, DeviceNet

Warm-Up Time: 4 Hours

For more details, see datasheet.

Datasheet

User Manual