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Fitting: VCFR4F,
Electrical Connection: 9 pin D Sub
Measuring range: 5×10⁻³ to 1,333 mbar (3.75×10⁻³ to 1000 Torr)
Measuring principle 5.0×10⁻³ to 3.99 mbar: Capacitance diaphragm gauge (CDG)
Measuring principle 4 to 5 mbar: Blended CDG / Piezo reading
Measuring principle 5 to 1333 mbar: MEMS piezo resistive diaphragm
Accuracy 1E-2 to 800 mbar: 0.5% of reading
Accuracy 800 to 1099 mbar: 0.25% of reading
Accuracy 1100 to 1200 mbar: 0.5% reading
Vacuum temperature sensor accuracy: +/-1.5°C
Transducer temperature sensor range: -20 to +85°C
Transducer temperature sensor accuracy: +/-1.5°C
Analog output resolution: 16 bit (150 µV)
Analog output update rate: 124 Hz
Response time: <20 ms
Temperature compensation: +10 to +50°C
Solid state relay set point range (absolute) 1×10⁻2 to 1,333 mbar (7.5×10⁻³ to 1000 Torr)
Solid state relay contact rating: 50 V, 100 mArms / mADC
Solid state relay contact endurance: Unlimited (no mechanical wear)
Solid state relay approvals:
UL Recognized: File E76270
CSA Certified: Certificate 1175739
EN/IEC 60950-1 Certified
For more details, see datasheet.
