Brooks Instrument BVT275 Pirani Vacuum Transducer (5×10^⁻3 ~ 1,333 mbar (3.75×10^⁻3 ~ 1000 Torr), VCFR4F, 9pin-D-SUB)

Fitting: VCFR4F,

Electrical Connection: 9 pin D Sub

Measuring range: 5×10⁻³ to 1,333 mbar (3.75×10⁻³ to 1000 Torr)

Measuring principle 5.0×10⁻³ to 3.99 mbar: Capacitance diaphragm gauge (CDG)

Measuring principle 4 to 5 mbar: Blended CDG / Piezo reading

Measuring principle 5 to 1333 mbar: MEMS piezo resistive diaphragm

Accuracy 1E-2 to 800 mbar: 0.5% of reading

Accuracy 800 to 1099 mbar: 0.25% of reading

Accuracy 1100 to 1200 mbar: 0.5% reading

Vacuum temperature sensor accuracy: +/-1.5°C

Transducer temperature sensor range: -20 to +85°C

Transducer temperature sensor accuracy: +/-1.5°C

Analog output resolution: 16 bit (150 µV)

Analog output update rate: 124 Hz

Response time: <20 ms

Temperature compensation: +10 to +50°C

Solid state relay set point range (absolute) 1×10⁻2 to 1,333 mbar (7.5×10⁻³ to 1000 Torr)

Solid state relay contact rating: 50 V, 100 mArms / mADC

Solid state relay contact endurance: Unlimited (no mechanical wear)

Solid state relay approvals:

UL Recognized: File E76270

CSA Certified: Certificate 1175739

EN/IEC 60950-1 Certified 

For more details, see datasheet.

Datasheet