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Maximum load [N]: 30
Load resolution [μN]: 6
Load noise floor [rms] [μN]: 100
Loading rate [N/min]: up to 300
Depth range [μm]: 1000
Depth resolution [nm]: 0.03
Depth noise floor [rms] [nm]: 1.5
Data acquisition rate [kHz] : 192
Scratch speed [mm/min]: 0.1 to 600
Options
Peltier heating up to 120 °C: ✓
Heating stage up to 200 °C: ✓
Cooling down to -120 °C: ✓
Liquid testing: ✓
